直播預告|清華大學、重慶理工大學等三位專家報告

直播時間：2024年6月18日（周二）20：00-22：00

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【直播簡介】

北京時間6月18日晚八點，我們邀請到了清華大學李星輝，重慶理工大學陳自然，中國科學院長春光學精密機械與物理研究所李紹娟三位教授主講，清華大學曹良才教授擔任研討嘉賓，中國科學院長春光學精密機械與物理研究所Light學術出版中心曹金擔任主持人，期待你一起加入這場知識盛宴。

【嘉賓介紹】

李星輝

清華大學

光柵感知：光柵干涉測量與數字光柵三維重建

[ABSTRACT]

Gratings owning periodical patterns, are essential approaches for precision measurement and stereoscopic sensing due to their powerful coding/decoding capacities, have long been playing a key role in advanced manufacturing and intelligent interaction. Two main types of gratings are physical surface-relief gratings engraved on solid substrates and digital gratings generated from projection. Physical grating, taking a holographic lithography fabricated grating as example, owns a feature size reaching sub-micron, and whole length of 100mm, expandability to be planar dots/holes array, has been becoming an ideal cooperation target for ultra-high precision multi-axes spatial gesture measurement. Digital grating, taking a structured light pattern an example, is easily generated from a high frequency, high accuracy digital projector, allowing grating patterns tunability both on spatial phase and on spatial frequency, offering powerful images data for digital signal based stereoscopic sensing. This report will streamline the gratings abovementioned, sensing principle, advanced technologies/prototypes, and typical application scenarios of which will be introduced.

周期性分布的光柵結構具有非常重要的信息編解碼能力，是精密測量和立體感知的關鍵手段，在先進制造、智能交互等領域發揮著重要的作用。光柵結構主要可以分為物理型的浮雕光柵和基于條紋投影技術的數字光柵。物理浮雕光柵以全息光刻加工為例，其特征結構可以達到亞微米，長度可達到100mm量級，可以拓展為面陣分布，這為超精密的空間位姿感知提供了具有決定性作用的測量合作目標。數字光柵以條紋結構光為例，可以通過具有高頻和高精度特征的投影系統來獲得，靈活地實現光柵圖案空間相位調制和空間頻率調制，為基于圖像感知的數字信號處理提供了豐富的數據，完成高性能立體感知。本報告將以光柵為主線，介紹其在上述兩方面的基本原理，先進技術，成套設備和典型應用場景。

[BIOGRAPHY]

Prof. Xinghui LI is the Associate Professor at Shenzhen International Graduate School (SIGS), Tsinghua University, Shenzhen, China, where he leads the “Optical Precision Nanometrology” Group. Prof. Li received this Ph.D. in Nanomechanics from Tohoku University, Japan (2014), M. S. in Mechatronics Engineering from Xi’an Jiaotong University, China (2011), and B.S. in Mechanical Design, Manufacturing and Its Automation from Wuhan University, China (2008). From 2014, Prof. Li worked as a postdoctoral fellow, Lecturer, Assistant Professor and Associate Professor in current institution. Prof. Li is an innovative scientist with extensive experience on grating interferometry, grating lithography fabrication, spectrum analysis and chromatic sensing, imaging processing and 3D reconstruction. He has published papers in top international journals, including IEEE TIM, MINE, Measurement, Computers in Industry, etc. He has been granted by NSFC, Provincial Key Project, Outstanding Funding from National Postdoctoral Committee, etc. He has been selected to Top 2% scientist (2023 single year), awarded “Highly Cited Award”, “Outstanding Contribution Award” of Journal NMME, etc.

李星輝教授是清華大學深圳國際研究生院副教授，博士生導師，長期從事光學精密納米測量領域的研究。李教授于2014年獲得日本東北大學納米力學博士學位，2011年獲得中國西安交通大學機械電子工程學位，2008年獲得中國武漢大學機械設計制造及其自動化學位。2014年以來李教授一直在清華大學深圳國際研究生院工作，先后任博士后研究院，講師，助理教授和副教授。李教授的研究領域為光載信息，在光學干涉測量、光柵光刻制造、光譜分析與共焦測量、圖像處理與數字光柵三維重建等方面擁有豐富的經驗。他在國際知名期刊發表多篇論文，包括《Microsystems & Nanoengineering》、《IEEE TIM》、《Computers in Industry》、《Measurement》等。在上述領域獲得國家自然科學基金面上項目、廣東省基金重點項目、博士后基金特別資助等多項科研資助。2023年度他被評委全球Top2%科學家，曾獲得“Highly Cited Award”、NMME期刊突出貢獻獎及多個會議的Best Paper Award。

陳自然

重慶理工大學

基于交變磁場平面二維時柵位移傳感機理及測量模型研究

[ABSTRACT]

Aiming at the technical bottlenecks of traditional two-dimensional displacement measurement technology, such as the ultra-precision lithography technology, the manufacturing of the sensor with large area, two-dimensional cooperative responses and the integrated signal processing, a two-dimensional displacement measurement method based on alternating magnetic field was presented. The exciting sine / cosine winding are arranged evenly and uniformly-spaced in the substrate of the fixed ruler, and the exciting electric current with time quadrature were applied to the exciting winding, and the two-dimensional alternating magnetic field required for measurement was established, which built the mapping relationship between the spatial two-dimensional displacement and the time reference. The spatial two-dimensional displacement measurement was realized by the measurement model of "dimension judgment + displacement decoupling". The dimension judgment was carried out by the logical combination benefiting from the binarization of the output signal of dimension- judgment induction winding array. The alternating magnetic field was picked up by the displacement-decoupling induction winding array with two- dimensions differential arrangement, and the spatial traveling-wave signals were obtained, and the displacement decoupling were realized by phase comparison. A three-dimensional measurement model was established, and the error analysis of the two-dimensional time-gating displacement measurement model was analyzed by electromagnetic simulation. A prototype was developed and an experimental platform was set up. The experimental results showed that in the effective measurement range of 120mm×120mm, the maximum measurement error of X direction was not more than ±9.4μm, the maximum measurement error of Y direction was not more than ±9.7μm, and the resolution was 0.15μm. The planar two-dimensional displacement sensor had the advantages of simple structure, fast signal decoupling, good stability and low cost, which demonstrated the significant value in theoretical research and engineering application.

針對傳統二維位移測量技術在超精密光刻、大面積傳感器制造、二維協同性響應和信號集成處理的技術瓶頸，提出了一種基于交變磁場的平面二維位移測量方法。采用在定尺平面兩維空間均勻等間距布置正弦/余弦激勵繞組，施加時間正交激勵電流，構建空間二維交變磁場，建立空間二維位移和時間基準的映射關系。通過“維度判斷+位移解耦”的組合測量模型實現平面二維位移測量，利用動尺維度判斷感應繞組陣列輸出信號經二值化后的組合邏輯來進行維度判斷；利用動尺兩維差動布置的位移感應繞組陣列拾取交變磁場，得到空間位移行波信號，通過比相實現二維位移解耦。建立了三維測量模型，通過電磁仿真，對平面二維時柵位移測量模型進行誤差分析。研制了樣機，搭建了實驗平臺，實驗結果表明，傳感器在120mm×120mm的有效測量范圍內，X方向測量誤差最大不超過±9.4μm， Y方向測量誤差最大不超過±9.7μm，分辨力為0.15 μm。該平面二維位移傳感器具有結構簡單、信號解耦快捷、穩定性好、成本低等優勢，具有重要的理論研究意義和工程應用價值。

[BIOGRAPHY]

Prof. Ziran Chen, Chongqing Talents·Innovation leader, is the deputy director of Engineering Research Center of Mechanical Testing Technology and Equipment, Ministry of Education, and the director of Chongqing Key Laboratory of Time-grating Sensing and Advanced Testing Technology,Chongqing University of Technology. He is mainly engaged in research on precision displacement detection, high-precision displacement sensor and intelligent instrument, etc. As the project leader, he is responsible for 23 scientific research projects, including the project of National Key Research and Development Program of China, 3 National Natural Science Foundation of China (2 general programs, 1 youth program), 17 provincial and ministerial level programs such as Key Technology Innovation Programs of Key Industries of Chongqing. He received Chongqing Award for Technological Invention 1st Prize (ranked No.6) . As the first author or the corresponding author, he has published more than 30 high-level papers in some important journals, such as IEEE Transactions on Instrumentation & Measurement, IEEE Sensors Journal, Transactions of the Institute of Measurement and Control, Journal of Mechanical Engineering, Chinese Journal of Scientific Instrument, Journal of Optics and Precision Engineering. He has obtained 8 authorized invention patents. He is the member of editorial board of the Journal of Photonics, Optics and Precision Engineering.

陳自然，研究員，博士，重慶英才·創新領軍人才。現任重慶理工大學機械檢測技術與裝備教育部工程研究中心副主任、時柵傳感及先進檢測技術重慶市重點實驗室主任。主要從事精密位移檢測、高精度位移傳感器及智能儀器等領域研究。作為項目負責人主持科研項目23項，其中國家重點研發計劃課題1項，國家自然科學基金項目3項(面上項目2項，青年項目1項)，重慶市重點產業共性關鍵技術創新專項等省部級項目17項。獲得重慶市技術發明一等獎（排名第6）等科研獎勵。以第一作者或通訊作者在國內外重要刊物如IEEE Transactions on Instrumentation & Measurement, IEEE Sensors Journal, Transactions of the Institute of Measurement and Control、機械工程學報、儀器儀表學報、光學精密工程等權威期刊上發表高水平論文30余篇，授權發明專利8項。兼任SCI期刊Photonics編委、光學精密工程期刊編委等學術兼職。

李紹娟

中國科學院長春光學精密機械與物理研究所

范德華光電器件與異質集成

[ABSTRACT]

Van der Walls (vdW) materials hold rich physical and electrical properties. They have been hailed as the rising star in broadband photonics and optoelectronics, promoting its potential applications in the next-generation miniaturized, low energy-consumption, and high-efficiency photon integrated circuits. In this talk, I introduce our recent research work on broadband photon coupling, detection, and signal processing based on vdW materials. We explored the localized optical fields in vdW crystals, showcasing the long-lived polaritons and waveguide modes in such materials. We also proposed new photodetection mechanisms, photogating-assisted tunneling, and with this new mechanism, the overall performance of the photodetection device has been improved to a higher level; Then we built up new optical coupling architecture based on plasmonic effect and silicon-based heterogeneous signal processing technology, which expands the integration function of optoelectronic components, and achieves applications including infrared imaging and human-machine interactions. With these work, we aim to create opportunities for future on-chip detection system that are highly-integrated and mimic multifunctional functions.

范德華材料具有豐富的物理和電學特性，他們被譽為寬帶光子學和光電子學的后起之秀，在下一代小型化、低能耗、高效率光子集成電路中的具有潛在應用。在本次報告中，我將介紹我們在基于范德華材料的寬帶光子耦合、檢測和信號處理方面的研究工作。我們探索了范德華晶體中的局域光場行為，展示了這類材料中長壽命的極化激元及波導現象。我們還提出新的光電探測機制，即光柵壓輔助隧穿，通過這種新機制，將器件對光場的整體感知性能提升到更高的綜合水平；進一步，我們建立了基于等離激元的新型光學耦合結構,開發了硅基異質讀取技術，實驗展示了這種集成結構在紅外成像、人機交互等方面的系列應用。通過這些工作，我們旨在為未來開發高度集成的多功能探測感知系統提供新的研究前景。

[BIOGRAPHY]

Shaojuan Li is a professor and deputy director of State Key Laboratory of Luminescence Science and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, China. She received her Ph.D. degree (2013) from Peking University (China) in Microelectronics and Solid Electronics. She has acquired multidisciplinary expertise in materials science, photonics, and nanotechnology. So far, she has published over 70 peer-reviewed journal articles, including Nature, Nature Communications, ACS Nano, Advanced Functional Materials, ACS Photonics, etc. She is a co-inventor on more than 30 patents. Her current research interests include plasmonic, detectors and optical sensors based on low-dimensional materials. She has awarded the Outstanding Youth Fund of the National Natural Science Foundation of China. Her research has been recognized as “Ten advances in Chinese optics –fundamental research”.

李紹娟研究員是中國科學院長春光學精密機械與物理研究所發光學及應用國家重點實驗室副主任。2013年獲得北京大學微電子與固體電子學博士學位。具有多年的半導體光電器件方面的研究經驗，在材料科學、光子學和納米技術等多學科交叉領域具有豐富的研究經歷。迄今為止，她已經在Nature, ACS Nano, Advanced Functional Materials, Small, ACS Photonics等刊物發表論文70余篇，是 30 多項專利的共同發明人。目前，她的主要研究興趣是基于低維材料的光探測和集成器件。她是國家自然科學基金優秀青年基金的獲得者。她的研究工作也曾獲得“中國光學十大進展-基礎研究類”。范德華光電器件與異質集成

【主持人】

曹金

中國科學院長春光學精密機械與物理研究所

【研討嘉賓】

曹良才

清華大學